[1]. Observation of Liquid Movement during PVA Brush Deformation in Post-CMP Cleaning ECS Journal of Solid State Science and Technology 14/ 024007 (2025) [Refereed] refereed [Internationally co-authored papers] non-internationally co-authored paper [Lead author or co-author] author [Author] M. Miwa, S. Suzuki, K. Ryota, T. Sanada [DOI] [2]. Three-dimensional numerical simulation of the single-wafer spin rinsing process using OpenFOAM Japanese Journal of Applied Physics 64/1 01SP25 (2025) [Refereed] refereed [Internationally co-authored papers] non-internationally co-authored paper [Lead author or co-author] co-author [Author] Y. Jinbo, T. Sanada [DOI] [3]. Agitation inside the Liquid Film on Two-Fluid Jet Sprayed Surface Journal of Photopolymer Science and Technology 37/4 397-400 (2024) [Refereed] refereed [Internationally co-authored papers] non-internationally co-authored paper [Lead author or co-author] author [Author] N. Doi, S. Watanabe, H. Takahashi, S. Hamada, M. Imai, T. Sanada [DOI] [4]. Global and local breakthrough curves: A concept for filtration design through analysis of internal concentration distribution using CFD Chemical Engineering Research and Design 207/ 110-120 (2024) [Refereed] refereed [Internationally co-authored papers] non-internationally co-authored paper [Lead author or co-author] co-author [Author] Y. Kasai, Y. Jinbo, H. Kamikawa, T. Sanada [DOI] [5]. 67/7 393-396 (2023) [Refereed] non-refereed [Internationally co-authored papers] non-internationally co-authored paper [Lead author or co-author] author [Author] 真田俊之, 濵田聡美
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[1]. (2006) [Book type]book(educational) [Sole author, co-author, or author and editor] joint work [Notes] 共著担当箇所(2.2節 生体流体工学 24-32)
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[1]. Observation of PVA roller brush nodule deformation and liquid movement The 18th International Conference on Planarization/CMP Technology 2023 (2023/11/) other [Presenter]S. Suzuki, Y. Mizushima, S. Hamada, R. Koshino, T. Sanada [2]. 光導波路を用いた混相流計測技術 日本機械学会RC297第三回研究分科会 (2023/11/) other [Presenter]真田俊之 [3]. 二流体ジェット噴射面に形成される液膜厚さ分布への液体温度の影響 応用物理学会界面ナノ電子科学研究会ポスター展 (2023/11/) other [Presenter]渡部真将, 水嶋祐基, 高橋広毅, 濱田聡美, 今井正芳, 真田俊之 [4]. 二流体ジェット噴射面における液膜内攪拌効果の検討 応用物理学会界面ナノ電子科学研究会ポスター展 (2023/11/) other [Presenter]土居尚人, 渡部真将, 水嶋祐基, 高橋広毅, 濱田聡美, 今井正芳, 真田俊之 [5]. OpenFOAMを用いたエッチングを伴う回転円盤上での液膜流れの数値計算 第84回応用物理学会秋季学術講演会 (2023/9/) other [Presenter]神保佳典, 佐藤雅伸, 真田俊之
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[1]. 気泡列の安定性評価による気泡クラスター形成機構の解明 ( 2024/4 ~ 2027/3 ) Grant-in-Aid for Scientific Research (B) leader [2]. 蒸気中の液滴固体面衝突における凝縮効果によるsplash発生抑制機序の解明 ( 2023/4 ~ 2026/3 ) Grant-in-Aid for Scientific Research (B) member [3]. 脱CO2を目指した誘導帯電技術を用いた新たな半導体デバイス製造プロセスの創出 ( 2023/4 ~ 2026/3 ) Grant-in-Aid for Scientific Research (C) member [4]. 高Oh液滴の固体面衝突直後に発生するsplashの相似則構築とメカニズム解明 ( 2020/4 ~ 2023/3 ) Grant-in-Aid for Scientific Research (B) member [5]. 音波照射による微細孔への液体侵入促進および液置換・乾燥技術への展開 ( 2019/4 ) Grant-in-Aid for Scientific Research (C) leader
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[1]. 液滴生成制御による水と水蒸気の混合噴流の物理力制御 (2014/10 - 2015/1 ) [Offer orgnization] クリタ水・環境科学振興財団 [2]. 流体物理作用のその場観察による洗浄基盤技術の構築 (2013/6 - 2014/1 ) [Offer orgnization] 公益財団法人 畠山文化財団 [3]. 小型水蒸気2流体洗浄機の開発 (2011/4 ) [Offer orgnization] 浜松地域テクノポリス推進機構 [System name] 試作開発支援事業 [4]. 液体を乱さない単一マイクロバブル生成制御法の開発 (2010/4 ) [Offer orgnization] 浜松科学技術研究振興会 [System name] 村田基金研究助成金 [5]. 水蒸気と水の混合噴流による低環境負荷洗浄装置の開発 (2008/4 ) [Offer orgnization] NEDO [System name] 産業技術研究助成事業
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[1]. (2024/11) [2]. (2024/11) [3]. Best paper award (2019/8) [Association] the Japanese Society for Multiphase Flow [4]. (2013/8) [5]. (2013/8)
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[1]. オーガナイズド混相流フォーラム (2013/12) [Role at conference, etc.] other [Site of conference, etc.] 千葉 [2]. ASME-JSME-KSME Fluids Engineering Conference 2011 (2011/7) [Role at conference, etc.] other [Site of conference, etc.] 浜松 [Notes] 学会主催者(日本機械学会,アメリカ機械学会,韓国機械学会)
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[1]. 日本機械学会論文集アソシエイトエディター (2018/4 ) [2]. 学術雑誌等の編集(混相流) (2007/8 - 2010/7 ) [Notes] 編集委員 |